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1200°C Max. 5" Split Vacuum Furnace w/ 12" heating zone & Separated Controller - OTF1200XS5
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1200°C Max. 5" Split Vacuum Furnace w/ 12" heating zone & Separated Controller - OTF1200XS5

1200°C Max. 5" Split Vacuum Furnace w/ 12" heating zone & Separated Controller - OTF1200XS5

OTF-1200X-S-5 is a compact and energy-saving split tube furnace with a max. The working temperature is 1200°C (Since 2016.11.08), and all electric parts are NRTL certified. The furnace adopts a 5" (130mm) O.D. quartz tube with a pair of stainless steel vacuum sealing flanges. The 1/4" barb fitting for the rubber hose connection allows heating samples in the vacuum or flowing gas. The temperature controller is separated from the furnace with 30 heating and cooling steps segments with +/- 1 °C accuracy. The furnace can anneal wafers up to 4 "in diameter.


SPECIFICATIONS:

Furnace Structure
 
  • Double-layer steel structure.
  • High-purity Al2O3 fibrous insulation with Max. energy saving.
  • High-purity alumina coating on refractory ceramics for longer service life.
  • This furnace can be modified into many special furnaces ( see the bottom application note)
Power 
3 KW
Voltage
220VAC 50/60Hz
Max. Temperature
1200°C (<1 hour)
Continuous Temperature
1100°C (continuous)
Max. Heating Rate
≤ 20 °C/min
Heating Zone Length
  • 12" (300mm), single zone.
  • Constant Temperature Zone
    • 100 mm length (+/-1ºC ): ( click drawing below for temp profile )
    • 140 mm length (+/-2ºC ): ( click drawing below for temp profile )
Temperature Control
 
  • PID automatic control via solid-state relay with 30 steps programmable.
  • Built-in Over Temperature and Thermal-couple Failure Protection.
  • Optional: The furnace may be operated by PC with the installation of a control module. Please order an MTS02-B control module at extra cost.
Advanced Temperature Controller (Optional)
  • MTS02-Y Temperature control software kit (for YD518P series controllers) + 15" laptop package is available at the options bar. Click for detailed information about the MTS02-Y software kit.
  • You may upgrade the temperature controller to the Eurotherm Temperature Controller with +/-0.1 °C accuracy. This package includes a Eurotherm programmer, a communication cable (RS485 - USB), and a software CD. Click the pic left to view the full spec of the Eurotherm 
Temperature Accuracy
+/- 1°C
Heating Elements
Fe-Cr-Al Alloy doped by Mo
Tube Size
  • 5" quartz tube (130mm O.D x 120mm I.D x 750mmL) is included. (Since 2016.11.08)
  • Two fibrous ceramic tube blocks are included to block heat radiation from the tube chamber. (Two Ceramic blocks must be fully inserted into the furnace chamber before heating)
  • Quartz blocks (optional) are ideal for cleaner and higher vacuum efficiency.
Vacuum Sealing

 Left Flange Right Flange


Optional Hinged Type Flange at extra cost
  • One pair of SS 304 vacuum flange with double high-temperature silicone O-ring and stainless steel protective shield are Included. (click the pictures left for more details).
    • KF25 port is built in the right side flange to connect a vacuum pump.
    • The vacuum gauge, inlet valve, and 1/4 thermocouple feed-through are built-in left side flange.
  • The vacuum level can reach 10-2torr (by a mechanical pump).
  • Option 1: Water cooling 5" flange with Support Fixture, which allows the furnace to achieve1200°C (Pic 1)
  • Option 2: Hinged type flange for easy sample loading( Pic.1- 2)
  • Option 3: A second temperature as a monitor can be added with an additional cost applied. ( Pic 2)
  • Option 4: For working temp < 500oC, and use it inside the glovebox, the furnace can be shortened to 500 mm L ( Pic. 3)
  •  pic 1 Pic 2 Pic. 3
Fitting Ports
&
Optional Parts
  • You may need a vacuum valve at the vacuum port click the picture left to order ).
  • You may click the pictures below to order a furnace with a vacuum pump and a temperature calibration kit.
Pressure Measurement / Monitoring
  • Standard mechanical vacuum gauge measures within a pressure range of -0.1 to 0.15Mpa are included.
  • OPTIONAL: A gas-type independent (above 10 mbar) digital vacuum gauge with a wide range between 3.8x10-5 to 1125 Torr. Aside from greater measurement precision, this gauge reduces the risks of chamber explosions caused by the incorrect reading of gas pressures due to gas-type dependency.
Optional Insertable Thermocouple
  • A K-type insertable thermocouple can be inserted through the flange to monitor the temperature inside the tube. Click the picture below to order
  • The heating furnace is available for spare and replacement ( click on the right picture below).
  • You may order flange support to avoid tube rotating ( click Pic below right )

 

$2,799.30

Original: $7,998.00

-65%
1200°C Max. 5" Split Vacuum Furnace w/ 12" heating zone & Separated Controller - OTF1200XS5—

$7,998.00

$2,799.30

More Images

1200°C Max. 5" Split Vacuum Furnace w/ 12" heating zone & Separated Controller - OTF1200XS5 - Image 2

1200°C Max. 5" Split Vacuum Furnace w/ 12" heating zone & Separated Controller - OTF1200XS5

OTF-1200X-S-5 is a compact and energy-saving split tube furnace with a max. The working temperature is 1200°C (Since 2016.11.08), and all electric parts are NRTL certified. The furnace adopts a 5" (130mm) O.D. quartz tube with a pair of stainless steel vacuum sealing flanges. The 1/4" barb fitting for the rubber hose connection allows heating samples in the vacuum or flowing gas. The temperature controller is separated from the furnace with 30 heating and cooling steps segments with +/- 1 °C accuracy. The furnace can anneal wafers up to 4 "in diameter.


SPECIFICATIONS:

Furnace Structure
 
  • Double-layer steel structure.
  • High-purity Al2O3 fibrous insulation with Max. energy saving.
  • High-purity alumina coating on refractory ceramics for longer service life.
  • This furnace can be modified into many special furnaces ( see the bottom application note)
Power 
3 KW
Voltage
220VAC 50/60Hz
Max. Temperature
1200°C (<1 hour)
Continuous Temperature
1100°C (continuous)
Max. Heating Rate
≤ 20 °C/min
Heating Zone Length
  • 12" (300mm), single zone.
  • Constant Temperature Zone
    • 100 mm length (+/-1ºC ): ( click drawing below for temp profile )
    • 140 mm length (+/-2ºC ): ( click drawing below for temp profile )
Temperature Control
 
  • PID automatic control via solid-state relay with 30 steps programmable.
  • Built-in Over Temperature and Thermal-couple Failure Protection.
  • Optional: The furnace may be operated by PC with the installation of a control module. Please order an MTS02-B control module at extra cost.
Advanced Temperature Controller (Optional)
  • MTS02-Y Temperature control software kit (for YD518P series controllers) + 15" laptop package is available at the options bar. Click for detailed information about the MTS02-Y software kit.
  • You may upgrade the temperature controller to the Eurotherm Temperature Controller with +/-0.1 °C accuracy. This package includes a Eurotherm programmer, a communication cable (RS485 - USB), and a software CD. Click the pic left to view the full spec of the Eurotherm 
Temperature Accuracy
+/- 1°C
Heating Elements
Fe-Cr-Al Alloy doped by Mo
Tube Size
  • 5" quartz tube (130mm O.D x 120mm I.D x 750mmL) is included. (Since 2016.11.08)
  • Two fibrous ceramic tube blocks are included to block heat radiation from the tube chamber. (Two Ceramic blocks must be fully inserted into the furnace chamber before heating)
  • Quartz blocks (optional) are ideal for cleaner and higher vacuum efficiency.
Vacuum Sealing

 Left Flange Right Flange


Optional Hinged Type Flange at extra cost
  • One pair of SS 304 vacuum flange with double high-temperature silicone O-ring and stainless steel protective shield are Included. (click the pictures left for more details).
    • KF25 port is built in the right side flange to connect a vacuum pump.
    • The vacuum gauge, inlet valve, and 1/4 thermocouple feed-through are built-in left side flange.
  • The vacuum level can reach 10-2torr (by a mechanical pump).
  • Option 1: Water cooling 5" flange with Support Fixture, which allows the furnace to achieve1200°C (Pic 1)
  • Option 2: Hinged type flange for easy sample loading( Pic.1- 2)
  • Option 3: A second temperature as a monitor can be added with an additional cost applied. ( Pic 2)
  • Option 4: For working temp < 500oC, and use it inside the glovebox, the furnace can be shortened to 500 mm L ( Pic. 3)
  •  pic 1 Pic 2 Pic. 3
Fitting Ports
&
Optional Parts
  • You may need a vacuum valve at the vacuum port click the picture left to order ).
  • You may click the pictures below to order a furnace with a vacuum pump and a temperature calibration kit.
Pressure Measurement / Monitoring
  • Standard mechanical vacuum gauge measures within a pressure range of -0.1 to 0.15Mpa are included.
  • OPTIONAL: A gas-type independent (above 10 mbar) digital vacuum gauge with a wide range between 3.8x10-5 to 1125 Torr. Aside from greater measurement precision, this gauge reduces the risks of chamber explosions caused by the incorrect reading of gas pressures due to gas-type dependency.
Optional Insertable Thermocouple
  • A K-type insertable thermocouple can be inserted through the flange to monitor the temperature inside the tube. Click the picture below to order
  • The heating furnace is available for spare and replacement ( click on the right picture below).
  • You may order flange support to avoid tube rotating ( click Pic below right )

 

Product Information

Shipping & Returns

Description

OTF-1200X-S-5 is a compact and energy-saving split tube furnace with a max. The working temperature is 1200°C (Since 2016.11.08), and all electric parts are NRTL certified. The furnace adopts a 5" (130mm) O.D. quartz tube with a pair of stainless steel vacuum sealing flanges. The 1/4" barb fitting for the rubber hose connection allows heating samples in the vacuum or flowing gas. The temperature controller is separated from the furnace with 30 heating and cooling steps segments with +/- 1 °C accuracy. The furnace can anneal wafers up to 4 "in diameter.


SPECIFICATIONS:

Furnace Structure
 
  • Double-layer steel structure.
  • High-purity Al2O3 fibrous insulation with Max. energy saving.
  • High-purity alumina coating on refractory ceramics for longer service life.
  • This furnace can be modified into many special furnaces ( see the bottom application note)
Power 
3 KW
Voltage
220VAC 50/60Hz
Max. Temperature
1200°C (<1 hour)
Continuous Temperature
1100°C (continuous)
Max. Heating Rate
≤ 20 °C/min
Heating Zone Length
  • 12" (300mm), single zone.
  • Constant Temperature Zone
    • 100 mm length (+/-1ºC ): ( click drawing below for temp profile )
    • 140 mm length (+/-2ºC ): ( click drawing below for temp profile )
Temperature Control
 
  • PID automatic control via solid-state relay with 30 steps programmable.
  • Built-in Over Temperature and Thermal-couple Failure Protection.
  • Optional: The furnace may be operated by PC with the installation of a control module. Please order an MTS02-B control module at extra cost.
Advanced Temperature Controller (Optional)
  • MTS02-Y Temperature control software kit (for YD518P series controllers) + 15" laptop package is available at the options bar. Click for detailed information about the MTS02-Y software kit.
  • You may upgrade the temperature controller to the Eurotherm Temperature Controller with +/-0.1 °C accuracy. This package includes a Eurotherm programmer, a communication cable (RS485 - USB), and a software CD. Click the pic left to view the full spec of the Eurotherm 
Temperature Accuracy
+/- 1°C
Heating Elements
Fe-Cr-Al Alloy doped by Mo
Tube Size
  • 5" quartz tube (130mm O.D x 120mm I.D x 750mmL) is included. (Since 2016.11.08)
  • Two fibrous ceramic tube blocks are included to block heat radiation from the tube chamber. (Two Ceramic blocks must be fully inserted into the furnace chamber before heating)
  • Quartz blocks (optional) are ideal for cleaner and higher vacuum efficiency.
Vacuum Sealing

 Left Flange Right Flange


Optional Hinged Type Flange at extra cost
  • One pair of SS 304 vacuum flange with double high-temperature silicone O-ring and stainless steel protective shield are Included. (click the pictures left for more details).
    • KF25 port is built in the right side flange to connect a vacuum pump.
    • The vacuum gauge, inlet valve, and 1/4 thermocouple feed-through are built-in left side flange.
  • The vacuum level can reach 10-2torr (by a mechanical pump).
  • Option 1: Water cooling 5" flange with Support Fixture, which allows the furnace to achieve1200°C (Pic 1)
  • Option 2: Hinged type flange for easy sample loading( Pic.1- 2)
  • Option 3: A second temperature as a monitor can be added with an additional cost applied. ( Pic 2)
  • Option 4: For working temp < 500oC, and use it inside the glovebox, the furnace can be shortened to 500 mm L ( Pic. 3)
  •  pic 1 Pic 2 Pic. 3
Fitting Ports
&
Optional Parts
  • You may need a vacuum valve at the vacuum port click the picture left to order ).
  • You may click the pictures below to order a furnace with a vacuum pump and a temperature calibration kit.
Pressure Measurement / Monitoring
  • Standard mechanical vacuum gauge measures within a pressure range of -0.1 to 0.15Mpa are included.
  • OPTIONAL: A gas-type independent (above 10 mbar) digital vacuum gauge with a wide range between 3.8x10-5 to 1125 Torr. Aside from greater measurement precision, this gauge reduces the risks of chamber explosions caused by the incorrect reading of gas pressures due to gas-type dependency.
Optional Insertable Thermocouple
  • A K-type insertable thermocouple can be inserted through the flange to monitor the temperature inside the tube. Click the picture below to order
  • The heating furnace is available for spare and replacement ( click on the right picture below).
  • You may order flange support to avoid tube rotating ( click Pic below right )

 

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