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Dual Tube (100/80 mm) CVD Sliding Furnace w/ 4 Ch Gas & Vacuum System - OTF-1200X-4-C4-SL-UL
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Dual Tube (100/80 mm) CVD Sliding Furnace w/ 4 Ch Gas & Vacuum System - OTF-1200X-4-C4-SL-UL

Dual Tube (100/80 mm) CVD Sliding Furnace w/ 4 Ch Gas & Vacuum System - OTF-1200X-4-C4-SL-UL

OTF-1200X-4-C4-SL is a special dual-tube CVD system designed for coating thin film on the metal foil, especially for preparing flexible electrodes on metallic foil on new generation energy research. Fast heating and cooling can be achieved by sliding the furnace. Please refer to the Operations Instructions section to see the operations of the furnace:

  • A dual quartz tube:100mm Dia. exterior tube and suspended by 80 mm Dia. interior tube. Metallic foil (Graphene Growth Substrate) will be wrapped around the inside tube surface for CVD reaction.
  • The flanges for the dual tube, allow reactive gasses to flow between two tubes (10mm space), and the inert gas flow inside the tube for cooling.
  • 4 gas channels controlled by 4 separate digital MFCs
  • The vacuum pump is included with a KF25 adapter and pipe for plug and play
  • A sliding rail is installed on the bottom of the furnace, which allows for fast heating or cooling by sliding the furnace from one side to the other side.
  • One slide-stopping clamp is included for holding the position of the furnace.

Both the heating zone and vacuum system are selectable: Single or dual heating zone; High-Speed Oilless Dry Vacuum Pump - VBS-M1 or Two-Stage Mechanical Pump - VBS-ACP15.

SPECIFICATIONS:

Furnace Structure Single heating zone Dual heating zone
Furnace Structure
  • High purity Al2O3 insulation chamber guarantees excellent temperature uniformity.
  • Cooling fans are installed at the bottom of the furnace to ensure efficient ventilation.
  • The sliding flange assembly is made of stainless steel.
  • Dual quartz tube:100mm Dia. exterior tube and suspended by 80 mm Dia. interior tube. Metallic foil (Graphene Growth Substrate) will be wrapped around the tube surface for the CVD reaction
  • Heating zone length: 440mm
  • Constant temperature heating zone length: 120 mm (±1°C)
  • High purity Al2O3 insulation chamber ensures excellent temperature uniformity.
  • Cooling fans are installed at the bottom of the furnace to ensure efficient ventilation.
  • Max. Temperature: 1200°C and continuous temperature: 1100°C.
  • Two Heating Zones are controlled separately: Dual-direction sliding rails to ensure the furnace moves smoothly.
  • 200mm length for each heating zone, 400mm total heating length
  • 250mm constant temperature zone if the two zones heating at the same temperature
  • 500°C max temperature difference if place a thermal block in between two-zone

Power
10 feet power cable with no plug (ask a licensed electrician to do the plug)

 Single heating zone
Power: 208-240VAC, 50/60Hz, single phase, 2.5KW (20A Breaker required)		 Dual heating zone
Power: 208-240VAC, 50/60Hz, single phase, 4 KW (50A Breaker required)
Heating Temperature
  • Max. Temperature: 1100°C
  • Continuous Temperature: 1000°C
Heating & Cooling Rate Max. heating and cooling rates depend on working temperature. Please click on the tables below to see Max. heating & cooling rate varies at different temperatures range.
(You shall calibrate temperature and heating cooling rate at your working condition before use)
Heating plot Heating plot Cooling plot Cooling plot 
Fused Quartz Tubes
  • High-purity quartz tube: Two pairs of vacuum-sealed flanges with water-cooling jackets and stainless steel needle valves
  • Outside tube EQ-QZTube-101D-1400: OD:4"x ID: 3.8" X 55" Length (OD 100 x ID 96 x 1400 mm)
  • Inside tube EQ-QZTube-80D-1800: OD:3.15: x ID x 2.95" x 70.8" Length (OD 80 x ID 75 x 1800 mm)
Vacuum Flanges Using dual-tube for inducing CVD growth on metal foil (wrapped around interior tube surface):
Please click for a related article: "Roll-to-roll production of 30-inch graphene films for transparent electrodes"
  • 1-1. Shown below, one pair of SS304 flanges to seal both the outside tube and space between the outside tube and inside the tube (this space is considered as a reaction chamber).
    • Left side flange: Barb fitting with needle valve as gas inlet, a digital vacuum gauge with measuring range 10^-4 to 1000 torr, water cooling inlet/outlet included
    • Right side flange: Right angle valve with KF25 flange fitting, a vacuum release needle valve, water cooling inlet/outlet included
  • 1-2. Leave both ends of the inside tube open for gas cooling.
Left Flange Left Flange Detail Right Flange Right Flange Detail
Left Flange   Right Flange  
Ultimate vacuum pressure: 10^-2 torr (by mechanical pump)
10^-5 torr (by turbo molecular pump)
Temperature Controller
  • PID automatic control with 30 programmable segments for precise control of heating rate, cooling rate, and dwell time.
  • Built-in over-temperature alarm and protection allow for operation without any attendant.
  • Over-temperature protection and alarm allow for operation without attendant(s).
  • +/- 1°C temperature accuracy.
  • RS485 Communications Port.
    • Advanced Temperature Control (Optional)
    • MTS02-Y Temperature control software kit (for YD518P series controllers) + 15" laptop package is available at the options bar. Click for detailed information about the MTS02-Y software kit.
    • You may upgrade the temperature controller to the Eurotherm 3504 Temperature Controller which is fully compatible with LabVIEW. This package includes a Eurotherm 3504 programmer, a communication cable (RS485 - USB), and a software CD. Click the pic below to view the full spec of the Eurotherm 3504 temperature controller.
  • Temperature Control Temperature Control System TCS Monitoring Eurotherm 3504
Mass Flow Meters & Gas Mixing Station

PLC MFC
  • 4 precision mass flow controllers (MFC) with digital display and adjusting knob are installed on the left bottom case to control gas flow rate:
  • 4 Gas channels (contact MTI sales if need more)
    • MFC 1: Control range from 0~100 SCCM
    • MFC 2: Control range from 0~200 SCCM
    • MFC 3: Control range from 0~200 SCCM
    • MFC 4: Control range from 0~500 SCCM
  • Flowing rate accuracy: ±1% FS
  • Gas inlet and outlet: 1/4" Swagelok tube connector
  • One 80mL gas mixing tank is installed in the bottom case
  • Each gas channel has a stainless steel needle valve for easy on/off
  • The flow rate is adjustable from the MFC panel
Vacuum Pump Station and valves
Vacuum Pump
  • The heavy-duty Double Step Rotary Vane Vacuum Pump with Exhaust Filter & KF-D25 Inlet is installed inside a heavy-duty mobile cart. Please click the picture below for more details.
  • 6.7x10-4 m-bar vacuum can be achieved inside the processing tube
  • A digital vacuum gauge (made in the USA) is installed on the left side flange. Please click the second picture below for more details
  • For vacuum level to 10^-5 torr, please order below mobile turbopump
Pump Filter Stinger Gauge
Water Cooling Function
Water Chiller 		 
Select Heating zone
Select Vacuum System
From $37,995.00
Dual Tube (100/80 mm) CVD Sliding Furnace w/ 4 Ch Gas & Vacuum System - OTF-1200X-4-C4-SL-UL—
$37,995.00

Dual Tube (100/80 mm) CVD Sliding Furnace w/ 4 Ch Gas & Vacuum System - OTF-1200X-4-C4-SL-UL

OTF-1200X-4-C4-SL is a special dual-tube CVD system designed for coating thin film on the metal foil, especially for preparing flexible electrodes on metallic foil on new generation energy research. Fast heating and cooling can be achieved by sliding the furnace. Please refer to the Operations Instructions section to see the operations of the furnace:

  • A dual quartz tube:100mm Dia. exterior tube and suspended by 80 mm Dia. interior tube. Metallic foil (Graphene Growth Substrate) will be wrapped around the inside tube surface for CVD reaction.
  • The flanges for the dual tube, allow reactive gasses to flow between two tubes (10mm space), and the inert gas flow inside the tube for cooling.
  • 4 gas channels controlled by 4 separate digital MFCs
  • The vacuum pump is included with a KF25 adapter and pipe for plug and play
  • A sliding rail is installed on the bottom of the furnace, which allows for fast heating or cooling by sliding the furnace from one side to the other side.
  • One slide-stopping clamp is included for holding the position of the furnace.

Both the heating zone and vacuum system are selectable: Single or dual heating zone; High-Speed Oilless Dry Vacuum Pump - VBS-M1 or Two-Stage Mechanical Pump - VBS-ACP15.

SPECIFICATIONS:

Furnace Structure Single heating zone Dual heating zone
Furnace Structure
  • High purity Al2O3 insulation chamber guarantees excellent temperature uniformity.
  • Cooling fans are installed at the bottom of the furnace to ensure efficient ventilation.
  • The sliding flange assembly is made of stainless steel.
  • Dual quartz tube:100mm Dia. exterior tube and suspended by 80 mm Dia. interior tube. Metallic foil (Graphene Growth Substrate) will be wrapped around the tube surface for the CVD reaction
  • Heating zone length: 440mm
  • Constant temperature heating zone length: 120 mm (±1°C)
  • High purity Al2O3 insulation chamber ensures excellent temperature uniformity.
  • Cooling fans are installed at the bottom of the furnace to ensure efficient ventilation.
  • Max. Temperature: 1200°C and continuous temperature: 1100°C.
  • Two Heating Zones are controlled separately: Dual-direction sliding rails to ensure the furnace moves smoothly.
  • 200mm length for each heating zone, 400mm total heating length
  • 250mm constant temperature zone if the two zones heating at the same temperature
  • 500°C max temperature difference if place a thermal block in between two-zone

Power
10 feet power cable with no plug (ask a licensed electrician to do the plug)

 Single heating zone
Power: 208-240VAC, 50/60Hz, single phase, 2.5KW (20A Breaker required)		 Dual heating zone
Power: 208-240VAC, 50/60Hz, single phase, 4 KW (50A Breaker required)
Heating Temperature
  • Max. Temperature: 1100°C
  • Continuous Temperature: 1000°C
Heating & Cooling Rate Max. heating and cooling rates depend on working temperature. Please click on the tables below to see Max. heating & cooling rate varies at different temperatures range.
(You shall calibrate temperature and heating cooling rate at your working condition before use)
Heating plot Heating plot Cooling plot Cooling plot 
Fused Quartz Tubes
  • High-purity quartz tube: Two pairs of vacuum-sealed flanges with water-cooling jackets and stainless steel needle valves
  • Outside tube EQ-QZTube-101D-1400: OD:4"x ID: 3.8" X 55" Length (OD 100 x ID 96 x 1400 mm)
  • Inside tube EQ-QZTube-80D-1800: OD:3.15: x ID x 2.95" x 70.8" Length (OD 80 x ID 75 x 1800 mm)
Vacuum Flanges Using dual-tube for inducing CVD growth on metal foil (wrapped around interior tube surface):
Please click for a related article: "Roll-to-roll production of 30-inch graphene films for transparent electrodes"
  • 1-1. Shown below, one pair of SS304 flanges to seal both the outside tube and space between the outside tube and inside the tube (this space is considered as a reaction chamber).
    • Left side flange: Barb fitting with needle valve as gas inlet, a digital vacuum gauge with measuring range 10^-4 to 1000 torr, water cooling inlet/outlet included
    • Right side flange: Right angle valve with KF25 flange fitting, a vacuum release needle valve, water cooling inlet/outlet included
  • 1-2. Leave both ends of the inside tube open for gas cooling.
Left Flange Left Flange Detail Right Flange Right Flange Detail
Left Flange   Right Flange  
Ultimate vacuum pressure: 10^-2 torr (by mechanical pump)
10^-5 torr (by turbo molecular pump)
Temperature Controller
  • PID automatic control with 30 programmable segments for precise control of heating rate, cooling rate, and dwell time.
  • Built-in over-temperature alarm and protection allow for operation without any attendant.
  • Over-temperature protection and alarm allow for operation without attendant(s).
  • +/- 1°C temperature accuracy.
  • RS485 Communications Port.
    • Advanced Temperature Control (Optional)
    • MTS02-Y Temperature control software kit (for YD518P series controllers) + 15" laptop package is available at the options bar. Click for detailed information about the MTS02-Y software kit.
    • You may upgrade the temperature controller to the Eurotherm 3504 Temperature Controller which is fully compatible with LabVIEW. This package includes a Eurotherm 3504 programmer, a communication cable (RS485 - USB), and a software CD. Click the pic below to view the full spec of the Eurotherm 3504 temperature controller.
  • Temperature Control Temperature Control System TCS Monitoring Eurotherm 3504
Mass Flow Meters & Gas Mixing Station

PLC MFC
  • 4 precision mass flow controllers (MFC) with digital display and adjusting knob are installed on the left bottom case to control gas flow rate:
  • 4 Gas channels (contact MTI sales if need more)
    • MFC 1: Control range from 0~100 SCCM
    • MFC 2: Control range from 0~200 SCCM
    • MFC 3: Control range from 0~200 SCCM
    • MFC 4: Control range from 0~500 SCCM
  • Flowing rate accuracy: ±1% FS
  • Gas inlet and outlet: 1/4" Swagelok tube connector
  • One 80mL gas mixing tank is installed in the bottom case
  • Each gas channel has a stainless steel needle valve for easy on/off
  • The flow rate is adjustable from the MFC panel
Vacuum Pump Station and valves
Vacuum Pump
  • The heavy-duty Double Step Rotary Vane Vacuum Pump with Exhaust Filter & KF-D25 Inlet is installed inside a heavy-duty mobile cart. Please click the picture below for more details.
  • 6.7x10-4 m-bar vacuum can be achieved inside the processing tube
  • A digital vacuum gauge (made in the USA) is installed on the left side flange. Please click the second picture below for more details
  • For vacuum level to 10^-5 torr, please order below mobile turbopump
Pump Filter Stinger Gauge
Water Cooling Function
Water Chiller 		 

Product Information

Shipping & Returns

Description

OTF-1200X-4-C4-SL is a special dual-tube CVD system designed for coating thin film on the metal foil, especially for preparing flexible electrodes on metallic foil on new generation energy research. Fast heating and cooling can be achieved by sliding the furnace. Please refer to the Operations Instructions section to see the operations of the furnace:

  • A dual quartz tube:100mm Dia. exterior tube and suspended by 80 mm Dia. interior tube. Metallic foil (Graphene Growth Substrate) will be wrapped around the inside tube surface for CVD reaction.
  • The flanges for the dual tube, allow reactive gasses to flow between two tubes (10mm space), and the inert gas flow inside the tube for cooling.
  • 4 gas channels controlled by 4 separate digital MFCs
  • The vacuum pump is included with a KF25 adapter and pipe for plug and play
  • A sliding rail is installed on the bottom of the furnace, which allows for fast heating or cooling by sliding the furnace from one side to the other side.
  • One slide-stopping clamp is included for holding the position of the furnace.

Both the heating zone and vacuum system are selectable: Single or dual heating zone; High-Speed Oilless Dry Vacuum Pump - VBS-M1 or Two-Stage Mechanical Pump - VBS-ACP15.

SPECIFICATIONS:

Furnace Structure Single heating zone Dual heating zone
Furnace Structure
  • High purity Al2O3 insulation chamber guarantees excellent temperature uniformity.
  • Cooling fans are installed at the bottom of the furnace to ensure efficient ventilation.
  • The sliding flange assembly is made of stainless steel.
  • Dual quartz tube:100mm Dia. exterior tube and suspended by 80 mm Dia. interior tube. Metallic foil (Graphene Growth Substrate) will be wrapped around the tube surface for the CVD reaction
  • Heating zone length: 440mm
  • Constant temperature heating zone length: 120 mm (±1°C)
  • High purity Al2O3 insulation chamber ensures excellent temperature uniformity.
  • Cooling fans are installed at the bottom of the furnace to ensure efficient ventilation.
  • Max. Temperature: 1200°C and continuous temperature: 1100°C.
  • Two Heating Zones are controlled separately: Dual-direction sliding rails to ensure the furnace moves smoothly.
  • 200mm length for each heating zone, 400mm total heating length
  • 250mm constant temperature zone if the two zones heating at the same temperature
  • 500°C max temperature difference if place a thermal block in between two-zone

Power
10 feet power cable with no plug (ask a licensed electrician to do the plug)

 Single heating zone
Power: 208-240VAC, 50/60Hz, single phase, 2.5KW (20A Breaker required)		 Dual heating zone
Power: 208-240VAC, 50/60Hz, single phase, 4 KW (50A Breaker required)
Heating Temperature
  • Max. Temperature: 1100°C
  • Continuous Temperature: 1000°C
Heating & Cooling Rate Max. heating and cooling rates depend on working temperature. Please click on the tables below to see Max. heating & cooling rate varies at different temperatures range.
(You shall calibrate temperature and heating cooling rate at your working condition before use)
Heating plot Heating plot Cooling plot Cooling plot 
Fused Quartz Tubes
  • High-purity quartz tube: Two pairs of vacuum-sealed flanges with water-cooling jackets and stainless steel needle valves
  • Outside tube EQ-QZTube-101D-1400: OD:4"x ID: 3.8" X 55" Length (OD 100 x ID 96 x 1400 mm)
  • Inside tube EQ-QZTube-80D-1800: OD:3.15: x ID x 2.95" x 70.8" Length (OD 80 x ID 75 x 1800 mm)
Vacuum Flanges Using dual-tube for inducing CVD growth on metal foil (wrapped around interior tube surface):
Please click for a related article: "Roll-to-roll production of 30-inch graphene films for transparent electrodes"
  • 1-1. Shown below, one pair of SS304 flanges to seal both the outside tube and space between the outside tube and inside the tube (this space is considered as a reaction chamber).
    • Left side flange: Barb fitting with needle valve as gas inlet, a digital vacuum gauge with measuring range 10^-4 to 1000 torr, water cooling inlet/outlet included
    • Right side flange: Right angle valve with KF25 flange fitting, a vacuum release needle valve, water cooling inlet/outlet included
  • 1-2. Leave both ends of the inside tube open for gas cooling.
Left Flange Left Flange Detail Right Flange Right Flange Detail
Left Flange   Right Flange  
Ultimate vacuum pressure: 10^-2 torr (by mechanical pump)
10^-5 torr (by turbo molecular pump)
Temperature Controller
  • PID automatic control with 30 programmable segments for precise control of heating rate, cooling rate, and dwell time.
  • Built-in over-temperature alarm and protection allow for operation without any attendant.
  • Over-temperature protection and alarm allow for operation without attendant(s).
  • +/- 1°C temperature accuracy.
  • RS485 Communications Port.
    • Advanced Temperature Control (Optional)
    • MTS02-Y Temperature control software kit (for YD518P series controllers) + 15" laptop package is available at the options bar. Click for detailed information about the MTS02-Y software kit.
    • You may upgrade the temperature controller to the Eurotherm 3504 Temperature Controller which is fully compatible with LabVIEW. This package includes a Eurotherm 3504 programmer, a communication cable (RS485 - USB), and a software CD. Click the pic below to view the full spec of the Eurotherm 3504 temperature controller.
  • Temperature Control Temperature Control System TCS Monitoring Eurotherm 3504
Mass Flow Meters & Gas Mixing Station

PLC MFC
  • 4 precision mass flow controllers (MFC) with digital display and adjusting knob are installed on the left bottom case to control gas flow rate:
  • 4 Gas channels (contact MTI sales if need more)
    • MFC 1: Control range from 0~100 SCCM
    • MFC 2: Control range from 0~200 SCCM
    • MFC 3: Control range from 0~200 SCCM
    • MFC 4: Control range from 0~500 SCCM
  • Flowing rate accuracy: ±1% FS
  • Gas inlet and outlet: 1/4" Swagelok tube connector
  • One 80mL gas mixing tank is installed in the bottom case
  • Each gas channel has a stainless steel needle valve for easy on/off
  • The flow rate is adjustable from the MFC panel
Vacuum Pump Station and valves
Vacuum Pump
  • The heavy-duty Double Step Rotary Vane Vacuum Pump with Exhaust Filter & KF-D25 Inlet is installed inside a heavy-duty mobile cart. Please click the picture below for more details.
  • 6.7x10-4 m-bar vacuum can be achieved inside the processing tube
  • A digital vacuum gauge (made in the USA) is installed on the left side flange. Please click the second picture below for more details
  • For vacuum level to 10^-5 torr, please order below mobile turbopump
Pump Filter Stinger Gauge
Water Cooling Function
Water Chiller 		 
Dual Tube (100/80 mm) CVD Sliding Furnace w/ 4 Ch Gas & Vacuum System - OTF-1200X-4-C4-SL-UL | MTI Online Store