Atmosphere Controlled RTP Furnace for 8" Wafer up to 1000 °C - VBF-1050X-H8

Furnace Structure

• IR heating holder with water cooling is installed in a vacuum chamber ( 16x14x15")
• The heating chamber of 8.5"x8.5" ( 200x200 mm) dia x 10 mm height 
• 25 mm dia quartz observation window is built-in on the front door 
• KF 25 vacuum port  and the valves of the gas inlet and outlet are built into the vacuum chamber
• A mechanical vacuum gauge is included
• A digital temperature controller with 30 segments programmable is included
• A k-type thermal couple is included

Power

Working Temperature

 

• 30 segments programmable via a digital temperature controller
• Working Temperature:    <= 800 °C continuously    Max. 1000 °C, < 30 minutes
• Max. Heating rate:   <= 300°C/ min    5°/second
• Max. Cooling:           <=  60ºC/min      1°/second
• Temperature stability: +/- 1°C
• RS485 port and soft is included for PC operation

Heating Chamber & Water Chiller

• Two IR heating plates are built-in stainless steel holders with water cooling jacket
• 8.5" square x 10 mm height heating chamber with water cooling jacket, which can accept 8"x8"  wafer 
• One quartz plate is placed in the bottom heating chamber to accept a wafer up to 8" x 5 mm thickness
• One 16L/minute recirculating water chiller is included for cooling the heating chamber

Vacuum level and Vacuum Pump
& Gas delivery system
( optional)

• 10- 2 torr via a rotary mechanical pump ( cold condition ) Pic. 1
• 10-4 torr via turbopump (a cold condition with baking ) Puc. 2
• KF25 vacuum port  and gas valves are included
• One mechanical vacuum gauge is included
• The vacuum pump is not included. Please click the link below (Pic. 1&2) to order separately
• Digital vacuum gauge up to 10-5 torr with KF16 port is optional  ( Click Pic 3 to order )
• You may order an inner gas delivery system by clicking Pic, 4
•      Pic. 1    Pic. 2Pic. 3 Pic. 4

Overall Dimensions

Click the picture to see the details

Net Weight

45 kg

Shipping Weight

150 lbs

Shipping Volume

45"(L) x28"(W) x35"(H) 

Warranty

• One-year limited warranty with lifetime support
  
• ATTENTION: Any damages caused by the use of corrosive and acidic gasses are not under the coverage of MTI One Year Limited Warranty.

Compliance
  

• CE Certified
• NRTL or CSA certification is available upon request at extra cost.

Operation Demo Video