Vacuumable & Atmosphere controlled Spin Coater ( 10K RPM & 6" wafer Max.) - VTC200PV

VTC-200PV is an atmosphere-controllable spin coater with Polypropylene air tighten, which can make spin coating either under a vacuum or inert gas atmosphere. The sample holder is included for coating wafer up to 6". The digital control box is separated from the spin coater which allows you to operate in a remote location. The spinning speed is variable from 500-10K rpm with two programmable segments. The package includes the two-stage vacuum pump, digital vacuum gauge, and 20ml syringe for immediate use.

SPECIFICATIONS:

Structure	The case and the spin disk are made of Polypropylene (PP) to resist most of the corrosive solutions. The digital control box is separated from the spin coater. One two-stage vacuum pump is included for the spinning chamber and one dry pump for the vacuum chuck. The digital vacuum gauge is installed on the top cover of the spin coater One filter is included in the standard package. It is used to connect the pump and coater to prevent wastewater from flowing into the pump. The sample can be held either by the mechanical fixture for liquid injection under a vacuum or by a vacuum chuck for liquid injection under an inert gas atmosphere
Input Power	Default 220VAC, 50/60Hz, single phase, 1000W Max. 110V is available in the optional bar ( with 1500W transformer ) A power socket on the back of the Digital control box is used to supply power to the vacuum pump. (The output voltage of this power outlet depends on the input voltage of the spin coater, e.g. if the spin coater is plugged into AC 110V, this power socket will supply AC 110V.)
Chamber & Vacuum Chuck	Chamber diameter: 150 mm PP anti-corrosive chuck which can hold substrate up to 6" Dia. either by vacuum or by the mechanical fixture Vacuum chuck only can be used in the inert gas atmosphere A mechanical chuck must be used for vacuum injection
Vacuum	One 156 L/m Double-Stage Rotary Vane Vacuum Pump with Exhaust Filter is included in the standard package, please click the picture below for specification details. (Pic.1) Max. vacuum level for the system is 110 torr
Spin Speed	Digital control panel with six programmable segments of different spin times and speeds Each step can run 999 S max. 500 -10K RPM adjustable spinning speed at each segment
Liquid Injecting	20mL syringe is used to contain the coating material
Motor	24VDC, Brushless, 200W max.:
Product Dimensions
Compliance	CE Certified NRTL or CSA certification is available upon request at the extra cost
Warranty	One year limited with lifetime support Rusting and damage due to improper storage condition or maintenance are not covered by warranty
Warnings	Do not overflush the water bowl/base with any kind of liquid. Excess liquid will leak into the motor shaft and cause damage. Please use a fabric cloth to wipe out the residues that remain in the bow/base. If necessary, turn on the water outlet when flushing the water bowl/base to avoid liquid overflowing during the operation. For more details about the cleaning procedure, please review the cleaning instructions for the spin coaters.
Shipping Dimensions	40"(L) x 30"(W) x 30"(H)
Shipping Weight	46 kg (100 lbs)