Evaporation coater in Glovebox for 4" Wafer with 3 Crucible & Temperature Control - VTC-EV3-GB

• The quartz vacuum chamber (O.D 280 x I.D 260 x H310 mm is installed at the bottom of the glove box for handling air-sensitive material 
• 4" Dia rotatable sample holder with 90 mm height adjustable for the uniform film coating
• Tungsten coil heater and alumina crucible for high-temperature coating up to 1700 ºC
• Precision temperature control with 30 programmable segments and +/- 1 ºC accuracy
• A high vacuum can be achieved up to 1.0E-5 Torr via optional turbopump
• The glove box with purification system to ensure oxygen and humidity are less than 1 ppm ) click underlined to see detailed specs )

• Evaporation coater
• Input voltage: AC110 V 50/60 Hz, single-phase
• Input Power: 1,200 W ( coater only)
• output power:: 12 V, and 30 A max current. Recommended working current <30 A
• Glovebox:
• Input voltage: AC110 V 50/60 Hz, single-phase
• Input Power: 1,500 W ( coater only)

• Three 3 mL Alumina Evaporating Crucibles with Tungsten coil are included 
• Three sources can be heated one by one to achieve a multi-layer coating 
• 3 pcs B-type thermocouple (installed in each crucible) - heating from 200 ºC - 1700 ºC (PIC. 1-2 )
• One digital temperature controller with 30 programmable segments and +/- 1 ºC accuracy (PIC. 2)
• Recommend to limit the temperature heating / cooling rate to 0.3 ºC/s (or 20 ºC/min) below 1200 ºC, and limit to 0.15 ºC/s (or 10 ºC/min) from 1200 - 1700 ºC

• One 4" Dia. rotatable sample stage and its shutter is installed on the top flange for coating a 4 " wafer
• Rotating speed: 5 rpm
• The distance from the sample holder to the evaporation source is adjustable from 40 mm to 90 mm
• A water sample holder is available at the extra cost ( recirculating water chiller is required )

• Precise quartz Film Thickness Monitor is optional, which is used for in-situ thickness measurement. Accuracy up to 1Å (Pic. 1)
• Precision Thin Film & Coating Analysis Systems - TFMS-LD is available at extra cost, please click pic.2 for details

• The KF40 vacuum port is installed to connect to a vacuum pump
• The vacuum may reach <1E-5 Torr by pumping overnight with optional Turbo-pump
• A vacuum pump is required for coating. Please choose from the following Product Options
• Double Stage Rotary Vane Vacuum Pump with vapor trap to eliminate the oil mist, which can reach vacuum up to 1.0E-2 Torr for evaporating noble metallic materials, such as gold, silver, and organic materials. Anti-Corrosive Capacitance Diaphragm Gauge is included
• Compact Turbomolecular Vacuum Pump System is able to provide a vacuum level up to 1.0E-5 Torr for evaporating oxygen-sensitive materials, such as Al. Mg, Li, etc. A combined Pirani and cold cathode gauge are included with the pump to measure vacuum up to 1.0E-8 Torr

• 1/4 tube fitting is built-in for chamber purge or forming gas processing
• One needle valve is built-in to control the gas flowing rate

• Extra alumina crucible and tungsten coil heater can be ordered by Click the pictures below.

• CE Certificate
• NRTL and CSA certification is available upon request

SPC2-ARSC