6-Source Thermal Evaporation Coater Integrated with Glovebox for Perovskite Solar Cells- MSKPSEGEC1515

Structure & Features

• The heating chamber is made of 304 stainless steel and integrated inside the glovebox
• Heating Chamber Dimensions: 400mm x 400mm x 450mm (L x W x H)
• 4” Observation window is equipped on the heating chamber door with anti-fouling baffle.
• The glovebox with purification system to ensure oxygen and humidity less than 1 ppm, click here to see detailed specifications.

Heating Chamber

• The internal heating chamber is made of multi-pieces structure to allow easy disassembly and installation.
• The Gas valve and vacuum system are integrated and positioned on the left side
• A water-cooling system is installed around the sample holder, with a sample baffle and film thickness monitor positioned at the top of the chamber.
• Three sets of metallic evaporation sources and three sets of organic cluster beam evaporation sources are mounted at the bottom of the chamber. An additional reserved port is available for the installation of a film thickness monitor probe.

Antechamber for Glovebox

• Large antechamber: Ø360mm x 600mm L, sliding tray included
• Small antechamber: Ø320mm x 155mm L

Power

Evaporation Coater:

• AC380V±10%, 3-Phase, 5-Wire, 50Hz, 8KW

Glovebox:

• AC220V±10%, Single Phase, 50Hz, 1KW

Control System

• One PLC touchscreen is used for monitoring pressure, water & oxygen level, and the purification system of the glovebox.
• A PLC touchscreen enables input of current/voltage settings, PID control, and film thickness monitor for the thermal evaporation process 

Sample Holder

• Supports sample up to 150mm L x 150mm W
• Equipped with the water-cooling function
• Supports rotation, 0-30 RPM
• Adjustable height up to 50mm from the target.

Target Station

3 metallic evaporation sources

• Max. Temperature up to 1500°C
• Support constant current/constant voltage modes

3 organic cluster sources 

• Temperature range: 0-700°C
• Adjustable angle up to 15°
• Real-time temperature monitor and programmable segment temperature control

Gas Inlet

(optional)

• Gas Inlet & Outlet: 8mm O.D Tube Fitting
• 0.55-0.6 Mpa is required for machine operation, please purchase separately.

Attention: If a gas cylinder is used, a two-stage pressure regulator must be installed on the gas cylinder to limit the pressure within the required working range for safe operation. Click here to learn the installation of a gas regulator.

Water Chiller

(optional)

• Water Inlet & Outlet Port: 1”
• Water flow: 15-20 L/min, 15-25°C.
• Water chiller is required to operate the machine but not included, please click here to order.

Safety Protection

• Interlocking protection system of water flow detection and alarm.
• Comprehensive detection and protection system for water shortage, overcurrent/overvoltage, and open-circuit of electrodes. 

Vacuum

A vacuum pump is required for the coating process.

• Mechanical pump can reach vacuum up to 1.0E-2 Torr for evaporating noble metallic materials.
• Compact Turbomolecular pump system enables to provide a vacuum level up to 1.0E-5 Torr for evaporating oxygen-sensitive materials.
• Leak rate < 5 x 10^-8 Pa*L/S

Compliance

• NRTL and CSA certification is available upon request at an extra cost