Name: 1100°C Three-zone Tube Furnace w/ an 11" or 15" Quartz Tube & Hinged Flanges - OTF-1100X-III
Brand: MTI Online Store
SKU: otf-1100x-iii
Availability: InStock

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1100°C Three-zone Tube Furnace w/ an 11" or 15" Quartz Tube & Hinged Flanges - OTF-1100X-III

OTF-1100X-III series is a three-zone split tube furnace with optional 11" or 15" OD quartz tubes and hermetic flanges. The furnace features a pair of motorized actuator to open and close the furnace lid in an ease. Three programmable PID temperature controllers allows a smooth heating and cooling ramps with a fluctuation less than 1ºC. It has been widely used for materials synthesis, wafer annealing, diffusion, and heat treatment for bulk sample under vacuum or gas atmosphere.

Features

Split tube furnace design
Working temperature ≤ 1100°C
Choice of tube size: 11" or 15"
Three heating zones, 300 + 300 + 300 mm
Uniform heating length 600 mm @ +/- 5°C @800 °C

SPECIFICATIONS

Power	480 VAC, three phase, 50/60 Hz, 40 A 30 kVA 10-foot power cord is included. More voltage rating is also available upon request.
Furnace structure	Double-layer steel casing with air cooling to keep surface temperature of the case < 70°C. Motorized actuator to open and close the furnace lid in an ease Refractory fibrous alumina thermal insulation
Heating zone	Total heating zone length 900mm Three zones: 300 mm + 300 mm + 300mm ( 900 mm in total) Constant temperature zone length: 600 mm (if three zones are in the same temperature within +/- 5°C) Cross-section Temperature tolerance +/- 5°C
Heating Elements	42 SiC heating elements
Working Temperature	≤ 1200 °C, up to 30 min ≤ 1100 °C, continuously at ambient pressure ≤ 900 °C, under vacuum
Heating Rate	≤ 10 °C/min ≤ 5 °C/min recommended
Temperature Controllers	Three programmable PID temperature controllers 30 temperature segments Control accuracy: +/- 1°C RS-485 communication
Eurotherm Controllers (optional)	Three Eurotherm 3000 series programmable PID temperature controllers 24 temperature segements Control accuracy: +/- 0.1°C RS-485 communication
Thermocouple	Type K
Quartz tube	11“ or 15" ID quartz tube with 73" Length is selectable from the product option 381 OD x 371 ID x 1860L mm (15"OD x 14.6" x 73"L) 279 OD x 269 ID x 1860L mm (11"OD x 10.6"ID x 73"L)
Thermal Blocks	Two fibrous ceramic thermal blocks Optional multi-quartz disk thermal blocks are available for higher vacuum at an extra cost
Flanges	A pair of stainless steel elastomer sealed flanges (hinged) 4 pieces of silicon O-rings Left Side Flange: stainless steel needle valves, 1/4" tube gas inlet, and a pressure gauge Right Side Flange: KF40 vacuum port, one 1/4" quick-connect port for in-situ temperature measurement
Pressure	< 3 psig
Vacuum level	Vacuum level depends on the vacuum pump and thermal block materials <5e-2 torr with a backing pump and alumina thermal blocks after bakeout. <1e-4 torr with a 700 L/s turbo pump and quartz thermal blocks <1e-3 torr with a 700 L/s turbo pump and alumina thermal blocks. All the pressure are measured at ambient temperature.
Installation	On-site installation is required
Options	Quartz wafer boat for 8" or 12" wafers

Select Tube size + Flanges

From $85,998.00

1100°C Three-zone Tube Furnace w/ an 11" or 15" Quartz Tube & Hinged Flanges - OTF-1100X-III—

$85,998.00

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