CGM-3F-PTFE is a compact three channel anti-corrosion gas mixing & delivery system, which can be put in a small fume-hood together with a tube furnace and be safer. All parts wetted with gas are made of PTFE (e.g. valve, pipe, mixing tank and flow-meter). It is designed for delivering corrosive gases, such as hydrogen sulfide (H2S) and hydrogen selenide ( H2Se) for CVD processing.
SPECIFICATIONS
| Floating meter |
- Three anti-corrosive Floating Flow-meter made of PTFE material with flow rates of 100 - 1000 mL/min (0.1 - 1.0 L/min)
- One Mechanical Pressure Gauge (mixing tank): 0 - 0.05 MPa, (0.02 MPa/grit)
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| Valve |
Three needle valves made of PTFE material which controls gas outlet on the front panel
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| Gas Tank |
500 mL gas tank made of PTFE A built-in gas mixing tank combines and mixes gases from three inlet channels. |
| Pipe fitting |
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Pipe fitting made of PTFE and accept 1/4" pipe (nylon or stainless steel)

- Three gas inlets with an independent gas flow meter for each channel.
- 20' length 1/4" PTFE pipe is included for immediate use
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| Dimension |
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| Shipping |
- Shipping dimension: TBD
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Shipping weight: 50 lbs
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Warranty
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Two years limited with lifetime support
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Related Products
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CVD & PECVD Furnace Click picture below to order bubbler or evaporator for CVD

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| Oxygen Monitoring |
An Oxygen Sensor can be used to monitor the oxygen level of gas(es) used in CVD systems for preventing or reducing oxidation. Please click the picture below to learn more:
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| Application Note |
- If your CVD processing involves corrosive gas, such as H2S, please consider using PTFE flange on your tube furnace
- Also, please choose an anti-corrosion dry vacuum pump instead of an oil vacuum pump
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