GSL-1100X-8.5-SR-III is a three heating zone 8.5" O.D quartz tube furnace with slidable vacuum flange and multi-gas fed through SS tube for LPCVD processing, It is widely used for depositing a various film on wafers up to 6" under multi-gas condition. The tubing furnace's max working temperature is 1100°C, which is controlled by a precision controller with accuracy +/-1°C and 30 segments programmable.
SPECIFICATIONS
| Furnace structure |
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Double-wall steel casing with forced air cooling.
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Two cooling fans inside to keep the temperature of outside case < 70 ºC
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High purity alumina fibrous insulation for max energy saving
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One sliding rail to support flange to load sample with ease
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Three heating zone to achieve a longer constant temperature zone or a certain temperature gradient
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| Input voltage |
220VAC Single phase |
| power |
8kW |
| Fused quartz tube size |
- 8.5" O.D x 8.2" I.D x 51" Length
- One quartz tube is included, and the spare tube is available as an option ( click picture below to order )

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| Heating element |
NiCrAl Resistance Wire |
| Working Temperature |
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Max. heating temperature: 1100°C
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Continuous working temperature: 400 -1000°C
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Max. heating/cooling rate: 10°C/min
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| Heating zone |
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Total heating zone length 900 mm (36")
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Three zones: 300 mm + 300 mm + 300mm (12" per zone)
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Constant temperature zone: 500 mm (if three zones are in the same temperature)
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| Temperature controller |
- Three precision temperature controller with PID function and 30 segments programmable
- One extra temperature monitor is built in to shut down power when temperature out of control by accident
- Double K type thermal couple installed.
- Temperature accuracy: +/-1°C
- Software and PC interface module is available at extra cost
- Eurotherm 3000 temp. controllers with +/- 0.1 oC accuracy are available upon request
Optional: PC interface & software Eurotherm temp. controllers
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| Vacuum Flange and gas feedthrough ports |
Right side flange Left side flange Sliding flange 
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| Compliance |
- CE Certified
- NRTL or CSA certification is available upon request
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| Warning |
- Tube furnaces with quartz tubes are designed for use under vacuum and low pressure < 0.2 bar / 3 psi / 0.02 MPa
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Attention: Due to the high-pressure gas output from the gas cylinder, it is necessary to install the gas pressure regulator with it to reduce the output pressure, avoid overpressurizing the furance chamber and ensure a safe operation. Click here to learn the installation of a gas regulator.
- Vacuum limit definition for all quartz tube furnaces: * Vacuum pressures may only be safely used up to 1000°C
- The flow rate for gases should be limited to<200 SCCM (or 200ml/min) for reducing thermal shocks to the tube.
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OPTIONAL ACCESSORY
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Part No.
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Description
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Quick Link
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Quartz tube block /heat insulating tube block (Compare with the conventional ceramic block, quartz thermal block with alumina fiber inside can help achieve a higher vacuum level and avoid potential contamination .) |
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KF-suite
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Heavy-Duty Rotary Vane Vacuum Pump (7.8 CFM -240 L/m) with Two-Stage Exhaust System, KF25D Adaptor, and Clamp - YTP-550
You will need a KF25 to KF40 adaptor for connecting the pump to the flange
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| MTS02 |
Computerized temperature Control System |
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CVM-211
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Compact Digital Vacuum Gauge & Controller with Power Supply (Up to 10-4 Torr) |
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High vacuum station (Mechanical pump + turbo molecular pump.) |
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Gas mix station (Float flow meter / Mass flow meter) (2, 3, 4channels selectable)
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Quartz Boats /crucible /container /sample holder |
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CW3000AG-110
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Thermolysis Water-cooled Chiller with 9 Liters Tank, 10L / min Flow
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FM-Cart-68
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800 x 600mm Heavy Duty Mobile Car for Tube and Box Furnaces |
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