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300W 13.56MHz RF Generator for 50 or 80 mm OD Tube Furnace - OTF-PECVD-RF
13.56MHz RF generator up to 300W for DIY of PECVD (Plasma Enhanced Chemical Vapor Deposition) for Plasma etching, Plasma cleaning, and plasma polymerization etc.
SPECIFICATIONS
| Noise | <50 dB |
| Output Power | 5 -300W adjustable with ± 1% stability |
| RF frequency | 13.56 MHz ±0.005% stability |
| Reflection Power | 200W max. |
| Matching | Automatic matching |
| RF Output Port | 50 Ω, N-type, female |
| Cooling | Air cooling |
| Power | 208-240VAC, 50/60Hz |
| Tube Size | 50, 80 or 125 mm OD please select from option bar ( larger diameter coil up to 11" diameter is available upon request ) |
| Application | Combine with MTI's tube furnace to get PECVD system  |
| Dimension |  |
Optional |
Please order the oilless pump for zero contamination, quartz tubes, and vacuum flanges can be ordered by clicking the pictures below:   |
|
Demo Video |
  |
| Warranty | One year limited warranty with lifetime support |
Select Tube Size
From $26,898.00
300W 13.56MHz RF Generator for 50 or 80 mm OD Tube Furnace - OTF-PECVD-RF—
$26,898.00
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300W 13.56MHz RF Generator for 50 or 80 mm OD Tube Furnace - OTF-PECVD-RF
13.56MHz RF generator up to 300W for DIY of PECVD (Plasma Enhanced Chemical Vapor Deposition) for Plasma etching, Plasma cleaning, and plasma polymerization etc.
SPECIFICATIONS
| Noise | <50 dB |
| Output Power | 5 -300W adjustable with ± 1% stability |
| RF frequency | 13.56 MHz ±0.005% stability |
| Reflection Power | 200W max. |
| Matching | Automatic matching |
| RF Output Port | 50 Ω, N-type, female |
| Cooling | Air cooling |
| Power | 208-240VAC, 50/60Hz |
| Tube Size | 50, 80 or 125 mm OD please select from option bar ( larger diameter coil up to 11" diameter is available upon request ) |
| Application | Combine with MTI's tube furnace to get PECVD system |
| Dimension | |
Optional |
Please order the oilless pump for zero contamination, quartz tubes, and vacuum flanges can be ordered by clicking the pictures below: |
|
Demo Video |
|
| Warranty | One year limited warranty with lifetime support |
Product Information
Product Information
Shipping & Returns
Shipping & Returns
Description
13.56MHz RF generator up to 300W for DIY of PECVD (Plasma Enhanced Chemical Vapor Deposition) for Plasma etching, Plasma cleaning, and plasma polymerization etc.
SPECIFICATIONS
| Noise | <50 dB |
| Output Power | 5 -300W adjustable with ± 1% stability |
| RF frequency | 13.56 MHz ±0.005% stability |
| Reflection Power | 200W max. |
| Matching | Automatic matching |
| RF Output Port | 50 Ω, N-type, female |
| Cooling | Air cooling |
| Power | 208-240VAC, 50/60Hz |
| Tube Size | 50, 80 or 125 mm OD please select from option bar ( larger diameter coil up to 11" diameter is available upon request ) |
| Application | Combine with MTI's tube furnace to get PECVD system |
| Dimension | |
Optional |
Please order the oilless pump for zero contamination, quartz tubes, and vacuum flanges can be ordered by clicking the pictures below: |
|
Demo Video |
|
| Warranty | One year limited warranty with lifetime support |
