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Four Source High Vacuum Thermal Evaporation Coater - GSL-1800X-ZF4

Four Source High Vacuum Thermal Evaporation Coater - GSL-1800X-ZF4

Four Source High Vacuum Thermal Evaporation Coater - GSL-1800X-ZF4

GSL-1800X-ZF4 is a high-vacuum evaporation coater designed for coating oxygen-sensitive metallic materials, such as Ti, Al, Au, etc. It also can be used for coating other materials. It has four evaporation heating sources for layer by layer deposition inside a high vacuum chamber, up to 10-6 torr.
Note: Since May 2023, increase chamber size to easily load sample

SPECIFICATIONS

Power	Input: 208 - 240VAC, 30 A, 50/60 Hz, single phase 5 KVA Output: 0 - 8VAC max. and 200A Max. (1600 W Max. )
Vacuum Chamber	Stainless steel chamber: 300mm ID. x 360 mm H, electropolished 100 mm observation window Hinged front door for easy sample loading Motorized shutters for each evaporation source One ISO-100K port for connection with a turbo pump and a gate valve. One KF16 port to connect the vacuum gauge One KF40 port Six CF35 ports to connect a necessary device (e.g., film thickness monitor (QCM))
Vacuum Pump ( optional)	260 L/s turbo molecular pump Vacuum level: 5.0x10^-6 Torr ( after 40 minutes of pumping if the chamber is backfilled with dry nitrogen and exposed to air in a short time) Ultimate vacuum: 5.0x10^-7 Torr ( after bake out at 100 -150°C) Leaking rate: 6.7×10-8 Pa·L/S Vacuum Port: DN 100 ISO-K (standard), DN160 ISO-K (optional) A mechanical pump (YTP-550-LD) is required as a backing pump to achieve the vacuum level of <1e-2 torr initially
Evaporation Source & Sample Holder	Four tungsten heating boats with water-cooled shrouds Tungsten heating boat, 70L x 12W x 3H (mm). Ø120 mm rotary sample holder Evaporation distance from source to sample holder is 140-200 mm The sample stage with a heating function (up to 500 °C) is optional upon request
Thickness measurement (Optional)	Quartz crystal microbalance is optional for thickness measurements The accuracy of thickness control is 1.0 Angstrom.
Control Unit	Vacuum, thickness, and power control are integrated into one control box
Chilled Water (Optional)	Chilled Water 30-60 psig (0.2 - 0.4 MPa), 15°C - 25 °C MTI recommends using a recirculating water chiller, KJ5000.
Certificate	CE certified NRTL or CSA certification is available upon request at the extra cost

$34,649.30

Original: $98,998.00

-65%

Four Source High Vacuum Thermal Evaporation Coater - GSL-1800X-ZF4—

$98,998.00

$34,649.30

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Four Source High Vacuum Thermal Evaporation Coater - GSL-1800X-ZF4 - Image 2

Four Source High Vacuum Thermal Evaporation Coater - GSL-1800X-ZF4

GSL-1800X-ZF4 is a high-vacuum evaporation coater designed for coating oxygen-sensitive metallic materials, such as Ti, Al, Au, etc. It also can be used for coating other materials. It has four evaporation heating sources for layer by layer deposition inside a high vacuum chamber, up to 10-6 torr.
Note: Since May 2023, increase chamber size to easily load sample

SPECIFICATIONS

Power	Input: 208 - 240VAC, 30 A, 50/60 Hz, single phase 5 KVA Output: 0 - 8VAC max. and 200A Max. (1600 W Max. )
Vacuum Chamber	Stainless steel chamber: 300mm ID. x 360 mm H, electropolished 100 mm observation window Hinged front door for easy sample loading Motorized shutters for each evaporation source One ISO-100K port for connection with a turbo pump and a gate valve. One KF16 port to connect the vacuum gauge One KF40 port Six CF35 ports to connect a necessary device (e.g., film thickness monitor (QCM))
Vacuum Pump ( optional)	260 L/s turbo molecular pump Vacuum level: 5.0x10^-6 Torr ( after 40 minutes of pumping if the chamber is backfilled with dry nitrogen and exposed to air in a short time) Ultimate vacuum: 5.0x10^-7 Torr ( after bake out at 100 -150°C) Leaking rate: 6.7×10-8 Pa·L/S Vacuum Port: DN 100 ISO-K (standard), DN160 ISO-K (optional) A mechanical pump (YTP-550-LD) is required as a backing pump to achieve the vacuum level of <1e-2 torr initially
Evaporation Source & Sample Holder	Four tungsten heating boats with water-cooled shrouds Tungsten heating boat, 70L x 12W x 3H (mm). Ø120 mm rotary sample holder Evaporation distance from source to sample holder is 140-200 mm The sample stage with a heating function (up to 500 °C) is optional upon request
Thickness measurement (Optional)	Quartz crystal microbalance is optional for thickness measurements The accuracy of thickness control is 1.0 Angstrom.
Control Unit	Vacuum, thickness, and power control are integrated into one control box
Chilled Water (Optional)	Chilled Water 30-60 psig (0.2 - 0.4 MPa), 15°C - 25 °C MTI recommends using a recirculating water chiller, KJ5000.
Certificate	CE certified NRTL or CSA certification is available upon request at the extra cost

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Description

GSL-1800X-ZF4 is a high-vacuum evaporation coater designed for coating oxygen-sensitive metallic materials, such as Ti, Al, Au, etc. It also can be used for coating other materials. It has four evaporation heating sources for layer by layer deposition inside a high vacuum chamber, up to 10-6 torr.
Note: Since May 2023, increase chamber size to easily load sample

SPECIFICATIONS

Power	Input: 208 - 240VAC, 30 A, 50/60 Hz, single phase 5 KVA Output: 0 - 8VAC max. and 200A Max. (1600 W Max. )
Vacuum Chamber	Stainless steel chamber: 300mm ID. x 360 mm H, electropolished 100 mm observation window Hinged front door for easy sample loading Motorized shutters for each evaporation source One ISO-100K port for connection with a turbo pump and a gate valve. One KF16 port to connect the vacuum gauge One KF40 port Six CF35 ports to connect a necessary device (e.g., film thickness monitor (QCM))
Vacuum Pump ( optional)	260 L/s turbo molecular pump Vacuum level: 5.0x10^-6 Torr ( after 40 minutes of pumping if the chamber is backfilled with dry nitrogen and exposed to air in a short time) Ultimate vacuum: 5.0x10^-7 Torr ( after bake out at 100 -150°C) Leaking rate: 6.7×10-8 Pa·L/S Vacuum Port: DN 100 ISO-K (standard), DN160 ISO-K (optional) A mechanical pump (YTP-550-LD) is required as a backing pump to achieve the vacuum level of <1e-2 torr initially
Evaporation Source & Sample Holder	Four tungsten heating boats with water-cooled shrouds Tungsten heating boat, 70L x 12W x 3H (mm). Ø120 mm rotary sample holder Evaporation distance from source to sample holder is 140-200 mm The sample stage with a heating function (up to 500 °C) is optional upon request
Thickness measurement (Optional)	Quartz crystal microbalance is optional for thickness measurements The accuracy of thickness control is 1.0 Angstrom.
Control Unit	Vacuum, thickness, and power control are integrated into one control box
Chilled Water (Optional)	Chilled Water 30-60 psig (0.2 - 0.4 MPa), 15°C - 25 °C MTI recommends using a recirculating water chiller, KJ5000.
Certificate	CE certified NRTL or CSA certification is available upon request at the extra cost

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