CGM-2F is a compact two-channel trace gas mixer for inert gas control in small tube furnaces, glove boxes, plasma cleaner, small PECVD system. This mixer regulates both line pressure and flow rate, and assures that you get the precise mixture at a lower cost and compact design. You can easily adapt this unit to most operations in atmospheric chambers.
SPECIFICATIONS
| Floating Flow-meter |
Two Floating Flow-meter with flow rate range from 16 to 160 mL/min |
| Mix Tank |
One stainless steel mix tank built in for better gas mixing |
| Mechanical Pressure Gauge (mixing tank) |
0 - 1.0 MPa, (0.02 MPa/grit) |
| Fittings & Valves |
Three Pipe fittings for 1/4" pipe (nylon or stainless steel) Three vacuum needle valves made of SS304
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Click the picture below-left to see the details of Mini CVD Tube Furnace with 2 channels Gas Mix System OTF-1200X-S50-2F
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