ALD/CVD/PVD
Compact 2 Channel MFC Gas Delivery System with PLC Touch Panel Control- GSL-2Z-LCD-S
$7,998.00
$2,799.30
2 Channel ALD Control Unit with 4 Channel MFC Gas Delivery System - GSLALD4
$49,998.00
$17,499.30
2-9 Channel Gas Control System with PLC Touch Panel and PC Operation Software - GSL-LCD
$7,995.00
$2,798.25
1200°C Tube Furnace w/ Hi-Vacuum (1E-4 torr) & 3 Channel Gas Flow Station for CVD - OTF-1200X-HVC3-series
$35,998.00
$12,599.30
1200°C Three Zones Tube Furnace with High Vacuum Station (1.0E-4 torr) + 4 Channel MFC Gas Station for CVD - OTF-1200X-III-HVC-LD
$46,998.00
$16,449.30
Three Zones Tube Furnace (4") with Vacuum Pump (1.0E-4 torr) + 9 Channel Digital Gas Flow-meters for CVD - OTF-1200X-4-III-9HV
$119,985.00
Single Zone Tube Furnace (80 mm Dia, 1200C Max) with 3 Channel Gas Mixer, Vacuum Pump, and Anti-Corrosive Vacuum Gauge - OTF-1200X-80-F3LV
$14,985.00
1200°C Max. Compact Auto-Sliding PECVD Furnace w/ 2" Tube and Vacuum Pump, - OTF-1200X-S50-PESL
$46,989.00
Gas Mixing Station with Three Channel Float Flowmeters and Valves - GSL-3F-SS
$2,998.00
$1,049.30
1700C Single Zone Alumina Tube Furnace with 3 Channel Gas Mixer, Vacuum Station, and Anti-Corrosive Vacuum Gauge - GSL-1700X-F3LV
$19,998.00
Three Zones CVD Tube Furnace with 8.5" Quartz Tube & Slidable Flange (1100C) - GSL-1100X-8.5-III-SR
$64,998.00
3 Zone Furnace (5" Dia, 1200C Max) w/ Sliding Flange, Gas Mixer & Vacuum Pump - OTF-1200X-III-5-C3LVSF
$39,985.00
