Silicon-on-Sapphire (11-02, R Plane), 5mm x 5mm x 0.46 mm, 2sp, Film: 0.5um thick
Materials: Silicon on Sapphire
- Silicon Orientation: (100)
- Type, Dopant: Intrinsic type, undoped
- Silicon Thickness: 0.5 um +/-10%
- Resistivity: > 100 ohm.cm
- Micro-particle density ( for particles > 2 um) < 2/cm^2
- R plane -- (1-102) with single flat
- Wafer size: 5x5 x 0.46 mm thickness
- Front surface: Epi-polished (Ra < 4 nm)
- Back surface: Optical grade polish
- TTV < 15 um, Bow < 20 um, Warp < 20 um, Flatness (TIR) < 12 um
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Original: $129.00
-65%$129.00
$45.15Silicon-on-Sapphire (11-02, R Plane), 5mm x 5mm x 0.46 mm, 2sp, Film: 0.5um thick
Materials: Silicon on Sapphire
- Silicon Orientation: (100)
- Type, Dopant: Intrinsic type, undoped
- Silicon Thickness: 0.5 um +/-10%
- Resistivity: > 100 ohm.cm
- Micro-particle density ( for particles > 2 um) < 2/cm^2
- R plane -- (1-102) with single flat
- Wafer size: 5x5 x 0.46 mm thickness
- Front surface: Epi-polished (Ra < 4 nm)
- Back surface: Optical grade polish
- TTV < 15 um, Bow < 20 um, Warp < 20 um, Flatness (TIR) < 12 um
Related Products
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Thin Films A-Z |
Crystal wafer A-Z |
Plasma Cleaner |
Wafer Containers |
Dicing saw |
Film Coater |
Product Information
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Description
Materials: Silicon on Sapphire
- Silicon Orientation: (100)
- Type, Dopant: Intrinsic type, undoped
- Silicon Thickness: 0.5 um +/-10%
- Resistivity: > 100 ohm.cm
- Micro-particle density ( for particles > 2 um) < 2/cm^2
- R plane -- (1-102) with single flat
- Wafer size: 5x5 x 0.46 mm thickness
- Front surface: Epi-polished (Ra < 4 nm)
- Back surface: Optical grade polish
- TTV < 15 um, Bow < 20 um, Warp < 20 um, Flatness (TIR) < 12 um
Related Products
![]() |
|||||
Thin Films A-Z |
Crystal wafer A-Z |
Plasma Cleaner |
Wafer Containers |
Dicing saw |
Film Coater |











