Silicon-on-Sapphire (11-02, R Plane ), 100mm Dia x 0.46mm,1sp, Film: 0.6 um thick
SOS(Silicon on Sapphire) Wafers (DSP-Double sides polished)
- Silicon Orientation: (100)
- Type, Dopant: Intrinsic type, undoped
- Silicon Thickness: 0.6 um +/- 10%
- Resistivity: > 100 ohm.cm
- Micro-particle density ( for particles > 2 um) < 2/cm^2
- R plane -- (1-102) with single flat
Purity: 99.996% - Wafer size: 100 mm dia x 0.46 mm thickness
- Flat : One flat 32.5mm +/-2.5mm, at 45+/- 1 deg CCW from <C> on <R>
- Front surface: Epi-polished (Ra < 4 nm)
- Back surface: Fine ground
- TTV < 15 um, Bow < 20 um, Warp < 20 um, Flatness (TIR) < 12 um, with Laser Mark on wafer back-side, just below the Flat
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Original: $1,199.00
-65%$1,199.00
$419.65Silicon-on-Sapphire (11-02, R Plane ), 100mm Dia x 0.46mm,1sp, Film: 0.6 um thick
SOS(Silicon on Sapphire) Wafers (DSP-Double sides polished)
- Silicon Orientation: (100)
- Type, Dopant: Intrinsic type, undoped
- Silicon Thickness: 0.6 um +/- 10%
- Resistivity: > 100 ohm.cm
- Micro-particle density ( for particles > 2 um) < 2/cm^2
- R plane -- (1-102) with single flat
Purity: 99.996% - Wafer size: 100 mm dia x 0.46 mm thickness
- Flat : One flat 32.5mm +/-2.5mm, at 45+/- 1 deg CCW from <C> on <R>
- Front surface: Epi-polished (Ra < 4 nm)
- Back surface: Fine ground
- TTV < 15 um, Bow < 20 um, Warp < 20 um, Flatness (TIR) < 12 um, with Laser Mark on wafer back-side, just below the Flat
Related Products
![]() |
|||||
Thin Films A-Z |
Crystal wafer A-Z |
Plasma Cleaner |
Wafer Containers |
Dicing saw |
Film Coater |
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Product Information
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Description
SOS(Silicon on Sapphire) Wafers (DSP-Double sides polished)
- Silicon Orientation: (100)
- Type, Dopant: Intrinsic type, undoped
- Silicon Thickness: 0.6 um +/- 10%
- Resistivity: > 100 ohm.cm
- Micro-particle density ( for particles > 2 um) < 2/cm^2
- R plane -- (1-102) with single flat
Purity: 99.996% - Wafer size: 100 mm dia x 0.46 mm thickness
- Flat : One flat 32.5mm +/-2.5mm, at 45+/- 1 deg CCW from <C> on <R>
- Front surface: Epi-polished (Ra < 4 nm)
- Back surface: Fine ground
- TTV < 15 um, Bow < 20 um, Warp < 20 um, Flatness (TIR) < 12 um, with Laser Mark on wafer back-side, just below the Flat
Related Products
![]() |
|||||
Thin Films A-Z |
Crystal wafer A-Z |
Plasma Cleaner |
Wafer Containers |
Dicing saw |
Film Coater |











